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ȸθ 밡 Ǵ Ǹμ, Ǹܱ, Ǹܹ ̶ մϴ. 99.9999999% Ǹ ü ӿ (seed)̶ ܰ ְ װ ø ̰Ϳ Ǹ ľ ȭ Ǿ ϴ. ܰ Ǹ ̰ ձ۰ ڸ Ǹ Դϴ.



 

300mm

Grade

Type

Orientation

Resistivity

Thickness

Test

P

1-0-0

1-50ohm.cm

750-800um

Dummy

P

1-0-0

3-25ohm.cm

750-800um



200mm

Grade

Type

Orientation

Resistivity

Thickness

Prime

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

700-750um

Test

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

700-750um

Dummy

P, N

1-0-0 / 1-1-1

1-100ohm.cm

700-750um



150mm

Grade

Type

Orientation

Resistivity

Thickness

Prime

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

650-700um

Test

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

650-700um

Dummy

P, N

1-0-0 / 1-1-1

0.001-999ohm.cm

650-700um



125mm

Grade

Type

Orientation

Resistivity

Thickness

Prime

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

600-650um

Test

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

600-650um



100mm

Grade

Type

Orientation

Resistivity

Thickness

Prime

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

500-550um

Test

P, N

1-0-0 / 1-1-1

0.005-70ohm.cm

500-550um